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US FED STD 209E Cleanroom Standards
|
Class
|
maximum particles/ft³
|
ISO
equivalent
|
|
≥0.1 µm
|
≥0.2 µm
|
≥0.3 µm
|
≥0.5 µm
|
≥5 µm
|
|
1
|
35
|
7
|
3
|
1
|
|
ISO 3
|
|
10
|
350
|
75
|
30
|
10
|
|
ISO 4
|
|
100
|
|
750
|
300
|
100
|
|
ISO 5
|
|
1,000
|
|
|
|
1,000
|
7
|
ISO 6
|
|
10,000
|
|
|
|
10,000
|
70
|
ISO 7
|
|
100,000
|
|
|
|
100,000
|
700
|
ISO 8
|
US FED STD 209E was officially cancelled by the General Services Administration of the US Department of Commerce November 29, 2001, but is still widely used
ISO 14644-1 Cleanroom Standards
|
Class
|
maximum particles/m³
|
FED STD 209E
equivalent
|
|
≥0.1 µm
|
≥0.2 µm
|
≥0.3 µm
|
≥0.5 µm
|
≥1 µm
|
≥5 µm
|
|
ISO 1
|
10
|
2
|
|
|
|
|
|
|
ISO 2
|
100
|
24
|
10
|
4
|
|
|
|
|
ISO 3
|
1,000
|
237
|
102
|
35
|
8
|
|
Class 1
|
|
ISO 4
|
10,000
|
2,370
|
1,020
|
352
|
83
|
|
Class 10
|
|
ISO 5
|
100,000
|
23,700
|
10,200
|
3,520
|
832
|
29
|
Class 100
|
|
ISO 6
|
1,000,000
|
237,000
|
102,000
|
35,200
|
8,320
|
293
|
Class 1000
|
|
ISO 7
|
|
|
|
352,000
|
83,200
|
2,930
|
Class 10,000
|
|
ISO 8
|
|
|
|
3,520,000
|
832,000
|
29,300
|
Class 100,000
|
|
ISO 9
|
|
|
|
35,200,000
|
8,320,000
|
293,000
|
Room air
|
BS 5295 Cleanroom Standards
| |
maximum particles/m³
|
|
Class
|
≥0.5 µm
|
≥1 µm
|
≥5 µm
|
≥10 µm
|
≥25 µm
|
|
Class 1
|
3,000
|
|
0
|
0
|
0
|
|
Class 2
|
300,000
|
|
2,000
|
30
|
|
|
Class 3
|
|
1,000,000
|
20,000
|
4,000
|
300
|
|
Class 4
|
|
|
200,000
|
40,000
|
4,000
|
BS 5295 Class 1 also requires that the greatest particle present in any sample does not exceed 5 μm.
GMP EU Classification
|
Class
|
maximum particles/m³
|
|
under equipped conditions
|
under equipped conditions
|
under working conditions
|
under working conditions
|
|
0.5 µm
|
5 µm
|
0.5 µm
|
5 µm
|
|
Class A
|
3500
|
0
|
3500
|
0
|
|
Class B
|
3500
|
0
|
350000
|
2000
|
|
Class C
|
350000
|
2000
|
3500000
|
20000
|
|
Class D
|
3500000
|
20000
|
n/a
|
n/a
|
This information was last modified on 18 February 2012 at 00:31.